共 50 条
- [1] SPUTTERING COMES OUT OF THE CLEAN ROOM.[J]. Machine Design, 1979, 51 (01) : 95 - 99Curry, David T.
ROBOTS IN THE CLEAN ROOM.
被引：0
|作者：
Iscoff, Ron
[1
]
机构：
[1] Semiconductor Int, Denver, CO, USA, Semiconductor Int, Denver, CO, USA
关键词：
INTEGRATED CIRCUIT MANUFACTURE - Automation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
As robots have become more sophisticated, their possible uses in semiconductor manufacturing is discussed. The article claims that robots are coming of age in the clean room. Their strength, the article explains, lies in their relatively low cost and the repeatable way they handle wafers without generating particulates.
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页码：50 / 57
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