Multiple interferometer for real-time position control

被引：0
|
作者：
Lawall, J. [1 ]
Howard, L. [1 ]
Deslattes, R.D. [1 ]
Wu, C.-M. [1 ]
机构：
[1] NIST, Gaithersburg, MD, United States
来源：
Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | 2000年
关键词：
Feedback - Laser beams - Laser mode locking - Mirrors - Optical design - Position control - Wavefronts;
D O I：
10.1109/cleo.2000.907402
中图分类号：
学科分类号：
摘要：
A quadruple Michelson interferometer to sense three degrees of freedom with independent verification of system accuracy from a Fabry-Perot interferometer is presented. Two important elements of the system allow additional control for systematic effects. First, there is an inherent redundancy in measuring three degrees of freedom with four interferometers. Second, an auxiliary scanning Fabry-Perot cavity is constructed using the same measurement mirror.
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