Inverse ray-tracing method for nondestructive mapping of three-dimensional surfaces

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作者：
机构：
[1] Arazi, L.
[2] Kelson, I.
[3] Ducommun, Y.
[4] Kapon, E.
来源：
Kelson, I. (kelson@post.tau.ac.il) | 1600年 / American Institute of Physics Inc.卷 / 95期
关键词：
Adsorption - Algorithms - Alpha particles - Approximation theory - Etching - Least squares approximations - Mapping - Nondestructive examination - Parameter estimation - Phosphorescence - Profilometry - Radioactivity - Sampling - Scanning tunneling microscopy - Thin films - Wavefronts;
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摘要：
A ray-tracing method for nondestructive mapping of three-dimensional surfaces, where the surface is made up of a large array of identical depressions, is discussed. The sample acted as isotropic sources of some detectable radiation, when marked with a uniform flux of particles. By measuring the emitted radiation from several directions, the surface can be reconstructed using a parametrization coupled with a least squares fit procedure. By using a particular sequence of alpha emitting atoms, the implementation of the algorithm to arrays of micron-scale inverted pyramids etched in GaAs substrates is reported.
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