SUB-MICROMETER LENGTH METROLOGY: PROBLEMS, TECHNIQUES AND SOLUTIONS.

The need for accurate dimensional measurements of features on micrometer-sized objects such as planar structures and spherical particles is rapidly expanding. This fostered a number of metrological techniques utilizing the SEM, the CTEM, and optical microscopy. These techniques are reviewed and a comparison of their relative utility for sub-micrometer length metrology is made. Limitations inherent in each technique are explored. A review of presently available reference standards for both displacement and width measurements is made along with a discussion of the utility of each of these standards.