Vibration control characteristic of rotating disk system for ion implanter equipped with magnetic bearing

被引：0
|
作者：
Hisatani, Masujiro
Inami, Shouichi
Takeyama, Kunihiko
机构：
来源：
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C | 1994年 / 60卷 / 573期
关键词：
Vibration control;
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页码：1540 / 1545
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