Effect of a funnel-shaped radiation shield on the characteristics of a silicon CZ furnace

被引：0
|
作者：
Honda, Koji [1 ]
Imaishi, Nobuyuki [1 ]
Tsukada, Takao [1 ]
Hozawa, Mitunori [1 ]
机构：
[1] Kyushu Univ, Kasuga, Japan
来源：
Journal of Chemical Engineering of Japan | 1992年 / 25卷 / 01期
关键词：
Semiconducting silicon;
D O I：
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学科分类号：
摘要：
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页码：84 / 89
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