Fabrication of X-ray mask by using diamond membrane

被引：0
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作者：
Zhang, Wenhua [1 ]
Ding, Guifu [1 ]
Wang, Qian [1 ]
Xu, Juntao [1 ]
Zhang, Shoubai [1 ]
机构：
[1] Shanghai Jiaotong Univ, Shanghai, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1998年 / 01期
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页码：37 / 42
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