共 50 条
- [1] EFFECT OF HELIUM GAS-PRESSURE ON X-RAY MASK HEATING DURING SYNCHROTRON-RADIATION EXPOSURE JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (01): : 75 - 80
- [2] HELIUM COOLING OF X-RAY OPTICS DURING SYNCHROTRON HEATING NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3): : 437 - 439
- [3] Synchrotron radiation damage mechanism of x-ray mask membranes irradiated in helium environment Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (12 B): : 4459 - 4462
- [4] Blurring effect analysis of an x-ray mask for synchrotron radiation lithography JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (04): : 1992 - 1997
- [5] SYNCHROTRON RADIATION-DAMAGE MECHANISM OF X-RAY MASK MEMBRANES IRRADIATED IN HELIUM ENVIRONMENT JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (12B): : 4459 - 4462
- [6] Thermal distortion of an X-ray mask for synchrotron radiation lithography JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12B): : 6804 - 6807
- [7] X-ray phase-shift mask for proximity X-ray lithography with synchrotron radiation PHOTOMASK AND X-RAY MASK TECHNOLOGY VI, 1999, 3748 : 462 - 471
- [10] Synchrotron radiation X-ray photoacoustic effect 9TH INTERNATIONAL CONFERENCE ON PHOTOACOUSTIC AND PHOTOTHERMAL PHENOMENA, CONFERENCE DIGEST, 1996, : 558 - 559