Thermal and mechanical coupling between successive pulses in KrF- excimer-laser ablation of polyimide

Multiple-shot effects in laser processing and ablation of polyimide are examined and are found to be the dominant phenomena for processes involving several hundreds or thousands of pulses. For fluences less than 260 mJ/cm2, it was found that it is impossible to cut through 75 μm polyimide foils for an arbitrarily large number of excimer pulses even though this fluence is more than ten times the single-shot ablation threshold. The halt in etching is due to the formation, over a number of shots, of a robust carbon matrix with a deep surface roughness which is also responsible for laser-induced electrical conductivity. The effect of thermal coupling between successive shots is shown to be a dominant factor in determining the electrical properties of the carbon layer. Differences in electrical conductivity of up to 12 orders of magnitude were found for only small differences in repetition rate. Transmission electron microscopy revealed the changes in microstructure responsible for the dramatic differences in electrical properties.