OXIDATION MECHANISM IN rf CO2 PLASMA.

被引：0
|
作者：
Nakano, Junichi [1 ]
Suzuki, Mineharu [1 ]
机构：
[1] NTT, Atsugi, Jpn, NTT, Atsugi, Jpn
来源：
Vacuum | 1985年 / 36卷 / 1-3期
关键词：
D O I：
10.1016/0042-207X(86)90276-9
中图分类号：
学科分类号：
摘要：
10
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页码：85 / 88
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