High resolution micro-positioning of a silicon cantilever using sputtered PZT films

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作者：
Jenkins, D.F.L. [1 ]
Cunningham, M.J. [1 ]
Velu, G. [1 ]
Remiens, D. [1 ]
机构：
[1] Univ of Manchester, Manchester, United Kingdom
来源：
Integrated Ferroelectrics | 1997年 / 17卷 / 1 -4 pt 1期
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页码：309 / 318
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