Analysis of the microstructure of laser crystallized hydrogenated amorphous silicon films by spectroscopic ellipsometry

被引：0
|
作者：
Dai, Yongbing [1 ]
Xu, Zhongyang [1 ]
Li, Churong [1 ]
Wang, Chang'an [1 ]
Zhang, Shaoqiang [1 ]
An, Chengwu [1 ]
Ding, Hui [1 ]
Li, Xingjiao [1 ]
机构：
[1] Huazhong Univ of Science and, Technology, Wuhan, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 1998年 / 29卷 / 05期
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摘要：
14
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页码：517 / 520
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