New type of metal ion source: surface diffusion Li+ ion source

被引：0
|
作者：
Medvedev, V.K. [1 ]
Suchorski, Yu. [1 ]
Block, J.H. [1 ]
机构：
[1] Fritz-Haber-Inst der, Max-Planck-Gesellschaft, Berlin, Germany
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 1995年 / 13卷 / 02期
关键词：
Ion sources;
D O I：
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学科分类号：
摘要：
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页码：621 / 624
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