Raman analysis of SiGe films grown by UHV/CVD

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作者：
Zhu, P.Y.
Chen, P.Y.
Li, C.
Luo, G.L.
Jia, H.Y.
Liu, Z.N.
Qian, P.X.
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Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis | 2001年 / 21卷 / 04期
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