Rigorous coupled wave analysis of grating-embedded multilayer structure conical diffraction

被引：0
|
作者：
Yang, Liang [1 ]
Li, Yanqiu [1 ]
Ma, Xu [1 ]
Sheng, Naiyuan [1 ]
机构：
[1] School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2014年 / 43卷 / 06期
关键词：
Electrostatic actuators - Incident light - Multilayers - Diffraction gratings - Polarization;
D O I：
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学科分类号：
摘要：
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页码：1899 / 1904
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