Microstructural characterization of semipolar GaN templates and epitaxial-lateral-overgrown films deposited on m-plane sapphire by metalorganic vapor phase epitaxy

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作者
Vennéguès, Philippe [1 ]
Bougrioua, Zahia [1 ,2 ]
Guehne, Tobias [1 ]
机构
[1] Centre de Recherche sur l'Hétéro-Epitaxie et Ses Applications, Centre National de la Recherche Scientifique, CRHEA-CNRS, Rue Bernard Grégory, Sophia Antipolis, 06560 Valbonne, France
[2] IEMN, CNRS, Lille University, 59652 Villeneuve d'Ascq, France
关键词
Gallium nitride;
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摘要
Journal article (JA)
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页码:4089 / 4095
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