Aluminum-induced crystallization of polycrystalline silicon-germanium thin films

被引：0
|
作者：
Lin, Jian-Yang [1 ]
Chang, Pai-Yu [2 ]
机构：
[1] Department of Electronic Engineering, National Yunlin University of Science and Technology, Taiwan
[2] Graduate School of Engineering Science and Technology, National Yunlin University of Science and Technology, Taiwan
来源：
International Journal of Electrical Engineering | 2010年 / 17卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
21
引用
收藏
页码：367 / 372
相关论文
共 50 条
  • [1] Polycrystalline silicon-germanium films prepared by aluminum-induced crystallization
    Qi, Jing
    Yang, Yang
    He, Deyan
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (11) : H903 - H908
  • [2] Aluminum-induced crystallization of amorphous silicon-germanium thin films
    Gjukic, M
    Buschbeck, M
    Lechner, R
    Stutzmann, M
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (11) : 2134 - 2136
  • [3] Polycrystalline silicon germanium thin films prepared by aluminum-induced crystallization
    Iwasa, Takehiro
    Kaneko, Tetsuya
    Nakamura, Isao
    Isomura, Masao
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (03): : 617 - 620
  • [4] Crystallization of silicon-germanium by aluminum-induced layer exchange
    Isomura, Masao
    Yajima, Masahiro
    Nakamura, Isao
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (02)
  • [5] Polycrystalline silicon thin films on glass by aluminum-induced crystallization
    Nast, O
    Brehme, S
    Neuhaus, DH
    Wenham, SR
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1999, 46 (10) : 2062 - 2068
  • [6] Optical and electrical properties of polycrystalline silicon-germanium thin films prepared by aluminum-induced layer exchange
    Gjukic, M
    Lechner, R
    Buschbeck, M
    Stutzmann, M
    [J]. APPLIED PHYSICS LETTERS, 2005, 86 (06) : 1 - 3
  • [7] Growth of poly-crystalline silicon-germanium on silicon by aluminum-induced crystallization
    Lin, Jian-Yang
    Chang, Pai-Yu
    [J]. THIN SOLID FILMS, 2012, 520 (23) : 6893 - 6899
  • [8] Preparation of high quality polycrystalline silicon thin films by aluminum-induced crystallization
    Tang, Zhengxia
    Shen, Honglie
    Huang, Haibin
    Lu, Linfeng
    Yin, Yugang
    Cai, Hong
    Shen, Jiancang
    [J]. THIN SOLID FILMS, 2009, 517 (19) : 5611 - 5615
  • [9] Aluminum-induced crystallization of hydrogenated amorphous germanium thin films
    Chambouleyron, I
    Fajardo, F
    Zanatta, AR
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (20) : 3233 - 3235
  • [10] Aluminum-induced crystallization of silicon suboxide thin films
    A. O. Zamchiy
    E. A. Baranov
    S. Ya. Khmel
    V. A. Volodin
    V. I. Vdovin
    A. K. Gutakovskii
    [J]. Applied Physics A, 2018, 124
12345