Integrated uniaxial tensile test system for measuring mechanical properties of MEMS materials

被引：0
|
作者：
Wang H. [1 ]
Tang J. [1 ]
Liu R. [1 ]
Chen H. [1 ]
Ding G.-F. [1 ]
机构：
[1] National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 05期
关键词：
Finish Element Method(FEM); Material mechanical test; Micro-electronic-Mechanical system; Nickel; Uniaxial tensile test; UV-LIGA; Young's modulus;
D O I：
10.3788/OPE.20101805.1204
中图分类号：
学科分类号：
摘要：
In order to measure the mechanical properties of micron-scale thin films, an integrated uniaxial tensile test system with lower cost is developed for measuring mechanical properties of MEMS materials. Firstly, test chips are optimized by Finite Element Method(FEM) to be gripped tightly and aligned in the pulling direction accurately. Furthermore, test chips with thin Ni films are fabricated on a glass substrate with UV-LIGA technology, which significantly reduces fabricating time and steps and eliminates the effect of wet anisotropic etching process on mechanical properties. Then, according to tensile test processes and facilities in the tensile system, a data acquiring and analysis system is designed by Visual Basic. Finally, the integrated tensile system is used to measure the mechanical properties of the Ni thin film. Experimental results show that the system precision is 0.01 μm for strain measurement, and mN level for stress measurement. Obtained Young's modulus and the ultimate tensile strength of the Ni thin film are about 94.5 GPa and 1.76 GPa, respectively. The integrated system with higher precision and lower cost can be used to study mechanical properties of electroplated metal materials.
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页码：1204 / 1211
页数：7
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