Observation of characteristics of magnetic neutral loop discharge plasma appearing at antenna in RF circuit

被引：0

作者：

Tsuboi, Hideo ^{[1
]}

Ogata, Seiji ^{[1
]}

机构：

[1] ULVAC, Inc., 2500 Hagizono, Chigasaki, Kanagawa 253-8543, Japan

来源：

| 1600年 / Japan Society of Applied Physics, 1-12-3 Kudan-Kita,k Chiyoda-ku, Tokyo, 102, Japan卷 / 46期

关键词：

Electric discharges;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

共 50 条

[1] Observation of characteristics of magnetic neutral loop discharge plasma appearing at antenna in RF circuit
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