Scanning Hartmann test method and its application lens aberration measurement

被引:0
|
作者
Liu, Dan [1 ,2 ]
Huang, Huijie [1 ]
Ren, Bingqiang [1 ]
Zeng, Aijun [1 ]
Yan, Yan [1 ]
Wang, Xiangzhao [1 ]
机构
[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
[2] Graduate School, Chinese Academy of Sciences, Beijing 100039, China
关键词
Aberrations - Lenses - Light measurement - Scanning;
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中图分类号
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摘要
A scanning Hartmann test method is proposed and its measurement principle is described. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. With the rotation of the scanning Hartmann screen and the improved hole arrangement, the whole information of the lens to be tested in the full aperture can be obtained. The measurement accuracy of the aberration is improved and the local error of the lens can be got. In the method, no change of the Hartmann screen is needed for measuring the lenses of different aperture sizes. Experimental results of aberration measurements of two lenses are given to verify the usefulness of the setup.
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页码:725 / 728
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