New super hard Ti-Si-C-N nanocomposite coatings deposited by pulsed DC plasma CVD

被引：0
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作者：
Chang, Gengrong [1 ]
Guo, Yan [1 ]
Ma, Shengli [1 ]
Xu, Kewei [1 ]
机构：
[1] State-Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2006年 / 35卷 / 05期
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页码：824 / 827
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