Reflectivity and structural evolution of Cr/Sc and nitrogen containing Cr/Sc multilayers during thermal annealing

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作者：
Eriksson, Fredrik [1 ]
Ghafoor, Naureen [1 ]
Hultman, Lars [1 ]
Birch, Jens [1 ]
机构：
[1] Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, 58183 Linköping, Sweden
来源：
Journal of Applied Physics | 2008年 / 104卷 / 06期
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