Plasma diagnostics and numerical simulations: Insight into the heart of analytical glow discharges

被引：0

作者：

Bogaerts, Annemie ^{[1
]}

机构：

[1] Research Group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Wilrijk-Anterp, Belgium

来源：

Journal of Analytical Atomic Spectrometry | 2007年 / 22卷 / 01期

关键词：

This review paper gives an overview of the fundamental studies; both by plasma diagnostics and numerical modelling; that have been carried out for analytical glow discharges. After some introduction about the basic aspects of a glow discharge; the various plasma diagnostic techniques that have been described in the literature for analytical glow discharges will be outlined; including a discussion on their strong and weak points; and a presentation of some characteristic results. The major part of the paper; however; focuses on modelling activities for a better description of glow discharges. An overview is given of possible modelling approaches for glow discharges in general; as a means to point out why we have chosen to describe analytical glow discharges by a hybrid modelling network; consisting of various sub-models. The latter will be briefly described; and typical calculation results will be outlined; mainly for glow discharges in direct current (dc) mode; which are nowadays well described by numerical modelling. The modelling of radiofrequency (rf) glow discharges was found to be more complicated; as described in this review; but we believe that the most important aspects of the rf glow discharge are also correctly predicted. For pulsed discharges; on the other hand; some unanswered questions remain; mainly related to the so-called afterpeak behaviour. Hence; this will need further attention in the future; by modelling and/or plasma diagnostic measurements. © The Royal Society of Chemistry 2007;

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