Measurement of lateral and vertical forces with accurate gap control for clarifying nano-lubrication phenomena

被引:0
|
作者
Fukuzawa K. [1 ]
Hayakawa K. [1 ]
Matsumura N. [1 ]
Itoh S. [1 ]
Zhang H. [1 ]
机构
[1] Department of Micro/Nano Systems Engineering, Nagoya University, Chikusa-ku, Nagoya-shi, Aichi, 464-8603, Furo-cho
关键词
Boundary lubrication; DoubleEnded tuning fork; Head media interface; Micro/Nano metrology; Micro/Nano-Tribology; Micromachine; Optical fiber;
D O I
10.1299/kikaic.76.717
中图分类号
学科分类号
摘要
A novel method for measurement of vertical and lateral forces with a high sensitivity and accurate gap control has been presented. It combines a double-ended tuning fork (DETF) resonator for the vertical force measurement with an optical fiber probe for the lateral force measurement. The theoretical and experimental investigations revealed that this method can provide simultaneous measurement for lateral and vertical forces of nanometer-gap lubrication with a precise gap of control within 1 nm. In addition, the attained force sensitivity is of the order of 10 nN. This method can be useful to clarify the nanolubrication or boundary lubrication phenomena, which has not been fully understood due to the difficulty of the measurement.
引用
收藏
页码:717 / 726
页数:9
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