Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films

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作者：
Adelhelm, C. [1 ]
Balden, M. [1 ]
Rinke, M. [2 ]
Stueber, M. [2 ]
机构：
[1] Max-Planck-Institut für Plasmaphysik, Materials Research, EURATOM Association, Boltzmannstraße 2, D-85748 Garching, Germany
[2] Forschungszentrum Karlsruhe, Institute of Materials Research i, Hermann-von-Helmholtz-Platz 1, D-76344 Eggenstein-Leopoldshafen, Germany
来源：
Journal of Applied Physics | 2009年 / 105卷 / 03期
关键词：
Raman spectroscopy;
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摘要：
Journal article (JA)
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