Preparation and charaterization of ZnO piezoeletric film

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作者
Xu, Heng-Xing [1 ]
Wang, Jin-Liang [1 ]
Tang, Ning [1 ]
Peng, Hong-Yong [1 ]
Fan, Chao [1 ]
机构
[1] School of Physics Science and Nuclear Energy Engineering, Beijing University of Aeronautics and Astronautics, Beijing 100191, China
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页码:880 / 883
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