Design and simulation of GaAs MEMS microwave power sensor

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作者：
Chen, Ning-Juan [1 ]
Liao, Xiao-Ping [1 ]
机构：
[1] Key Laboratory of MEMS, Southeast University, Nanjing 210096, China
来源：
Dianzi Qijian/Journal of Electron Devices | 2006年 / 29卷 / 01期
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页码：79 / 81
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