A journey of success

Lotus Systems, Gutmadingen, Germany, has developed automated units capable of handling the most exacting processes on wafer substrates. The company provides wet process equipment and chemical management systems for clean room environments. Wafer wet cleaning system offers assurance and control required for clean room facilities. It removes microcontaminants, such as particles, metallic impurities and trace organic contaminants. It removes the substrates after contaminant processes. It automatically prepares the wafers structures for measurements and layer depositions, photolithography, and etch for higher production. The company has also developed chemical management systems that assist customers to manufacture integrated circuits, MEMS, optical device and solar cells.