Heteroepitaxy of corundum-structured α-Ga2O3 thin films on α-Al2O3 substrates by ultrasonic mist chemical vapor deposition

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作者：
Shinohara, Daisuke [1 ]
Fujita, Shizuo [1 ]
机构：
[1] Graduate School of Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8520, Japan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 9 PART 1期
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页码：7311 / 7313
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