Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

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[1] [1,Umirzakov, B.E.
[2] Tashmukhamedova, D.A.
[3] Ruzibaeva, M.K.
[4] Djurabekova, F.G.
[5] Danaev, S.B.
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Ruzibaeva, M.K. | 1600年 / Elsevier B.V., Netherlands卷 / 326期
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