Laser induced damage threshold testing of DUV optical substrates

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作者
Deng, Wenyuan [1 ]
Jin, Chunshui [1 ]
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[1] State Key Library of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
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10.3788/COL201311.S10702
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