Measurement of micro-cavity dimension by double optical fiber coupler based on OFMM's location

被引：0
|
作者：
Cui J.-W. [1 ]
Chen S.-L. [1 ]
Tan J.-B. [1 ]
机构：
[1] Institute of Ultra-precision Optical and Electronic Instrument Engineering, Harbin Institute of Technology
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 05期
关键词：
Double optical fiber coupler; Measurement of micro-cavity dimension; Orthogonal Fourier-Melline Moments(OFMM's); Reversal transmission;
D O I：
10.3788/OPE.20101805.1068
中图分类号：
学科分类号：
摘要：
In order to measure micro-cavity dimensions precisely, an aiming and triggering measurement method by a double optical fiber coupler based on the location of Orthogonal Fourier-Mellin moments (OFMM's) is proposed. By transmitting reversely the light between different optical fibers through the coupler, the method transforms the transverse displacement of the fiber probe into the displacement of laser, and the laser displacement then is transformed into a large displacement of a CCD by a lens. To improve accuracy, the rotation invariance and particular description capability of OFMM's is used to locate the edge of image at subpixel, and a compensation based on OFMM's real position is proposed to improve the precision of edge location. The location accuracy of OFMM's and performance of sensor are experimentally measured. According to JJF(hei)8-2008, the proposed method with a researched micro-hole machine are used to measure the diameter of a blind micro-hole with the depth of 2000 μm and diameter of 200 μm, and the obtained repeatability uncertainty is less than 0.25 μm.
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页码：1068 / 1076
页数：8
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