Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology

被引：0
|
作者：
Du, Li-Qun [1 ,2 ]
Mo, Shun-Pei [1 ]
Zhang, Yu-Sheng [2 ]
Liu, Chong [1 ,2 ]
机构：
[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China
[2] Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 02期
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摘要：
11
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页码：363 / 368
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