Atomic layer deposited passivation layers for superlattice photodetectors

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作者：
Salihoglu, Omer [1 ]
机构：
[1] Tubitak MAM, Energy Institute, 41470 Gebze, Kocaeli, Turkey
来源：
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | 2014年 / 32卷 / 05期
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