Design of resonant MEMS temperature sensor

被引：2
|
作者：
Ma H.-Y. [1 ]
Huang Q.-A. [1 ]
Qin M. [1 ]
机构：
[1] Key Laboratory of MEMS of the Ministry of Education, Southeast University
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 09期
关键词：
Frequency measurement; Micro-electrical-mechanical system(MEMS); Resonance cantilever; Temperature sensor;
D O I：
10.3788/OPE.20101809.2022
中图分类号：
学科分类号：
摘要：
In order to realize meteorologic temperature measurement based on frequency outputs, a resonant micro-temperature sensor with a bilayer cantilever was proposed. According to the working principle that the resonant frequency of the microcantilever will be shifted due to the thermal expansion coefficient mismatch between the two-materials, the temperature variation could be detected by driving the cantilever and detecting the resonant frequency with piezoelectric excitation and detection. The structure of the temperature sensor was designed according to the front side fabrication process of silicon. Then, the resonant modes, detectable models and the effect of temperature on these models were analyzed by means of finite element method. The resonant characteristics were also researched with a polytech laser Doppler vibrometer. The results indicate that the 2nd resonant model of the cantilever has the largest Q factor about 150 as compared with other resonant models. Furthermore, the higher mode, particularly the 2nd resonant model is more suitable for detecting the resonant frequency of the temperature sensors by utilizing ZnO as piezoelectric materials and it can offer a relative higher sensitivity about 20 Hz/°C and temperature coefficient of frequency about 1.9 × 10-4/°C. These results show that the sensor can satisfy the requirements of meteorologic temperature measurement and has the advantages of high electrical stability, high sensitivity and simple signal transmission interface.
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页码：2022 / 2027
页数：5
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