Micro inertial driving actuator with built-in position sensor

被引：0
|
作者：
Matsuki, Kaoru [1 ]
Takahashi, Masaya [1 ]
Morishima, Tetsuya [1 ]
机构：
[1] Olympus Corporate RandD Center 2-3, Hachioji-shi, Tokyo 192-8512, Japan
来源：
IEEJ Transactions on Sensors and Micromachines | 2014年 / 134卷 / 06期
关键词：
7;
D O I：
10.1541/ieejsmas.134.140
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：140 / 145
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