Novel type of power supply for high-power pulsed magnetron sputtering

被引：0
|
作者：
Wang, Hongguo [1 ]
Chen, Qingchuan [1 ]
Han, Dakai [1 ]
Yin, Xing [1 ]
Xu, Zejin [1 ]
Shen, Liru [1 ]
Jin, Fanya [1 ]
机构：
[1] Southwestern Institute of Physics, Chengdu 610054, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2013年 / 33卷 / 02期
关键词：
D O I：
10.3969/j.issn.1672-7126.2013.02.14
中图分类号：
TM7 [输配电工程、电力网及电力系统];
学科分类号：
080802 ;
摘要：
引用
收藏
页码：168 / 170
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