Non-damaged preparation and energy band structure modulation of silicon-based nitrogen-terminated diamond films

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作者
Chen, Yutong [1 ]
Nie, Haoxin [1 ]
Wu, Guoguang [1 ]
Nie, Rongtao [1 ]
Wang, Xiaoqiu [1 ]
Ren, Mengmeng [1 ]
Zhang, Baolin [1 ]
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[1] State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun,130012, China
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10.1016/j.diamond.2024.111666
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