Preparation of Rare Earth Polishing Powder Based on Fluorosilicate Mixed Acid and Its Polishing Performance

被引：0

作者：

Fan N. ^{[1
]}

Chen C. ^{[1
]}

Yu J. ^{[1
]}

Hu Q. ^{[1
]}

Yue S. ^{[1
]}

Zhao S. ^{[1
]}

Liu Y. ^{[1
]}

机构：

[1] Baotou Research Institute of Rare Earths, National Engineering Research Centre of Rare Earth Metallurgy and Functional Materials, Baotou

来源：

Zhongguo Xitu Xuebao/Journal of the Chinese Rare Earth Society | 2024年 / 42卷 / 02期

关键词：

fluorinated polishing powder; fluorosilicate mixed acid; hydrofluoric acid; polishing performanc;

D O I：

10.11785/S1000-4343.20240208

中图分类号：

学科分类号：

摘要：

The fluorine-containing and cerium-based rare earth polishing powder was prepared with carbonate lanthanum cerium as precursor by the processes including fluorination of hydrofluoric acid and fluorosilicate mixed acid，high temperature calcination and ball milling. Performances of cerium-based rare earth polishing powders with different fluorine were characterized by X-ray diffraction，scanning electron microscope，transmis⁃ sion electron microscope particle，size analyzer，laser confocal microscope and other detection methods. The re⁃ sults show that the phase compositions of cerium-based rare earth polishing powders after fluorination with hydro⁃ fluoric acid and fluorosilicate mixed acid are the same，with CeO2，LaOF and LaF3 diffraction peaks appearing. After fluorination，the morphology of the two kinds of polishing powders changes significantly. The polishing powder particles after fluorination with hydrofluoric acid were well formed，and the average particle size of the primary particles is about 113 nm. Spherical particles appear after the fluorosilicate mixed acid fluoridation，and the average particle size of the primary particles is about 90 nm. Compared with the cerium-based rare earth pol⁃ ishing powder fluorinated by hydrofluoric acid，the particle size is smaller and the sphericity is better. The grind⁃ ing rate of the cerium-based rare earth polishing powder fluorinated by hydrofluoric acid and fluorosilicate mixed acid remained basically unchanges for four times. The surface roughness of the polished K9 glass of 250 μm× 250 μm is 84.54 and 81.85 nm，respectively. The difference of surface roughness between the two polishing powders is small. © 2024 Editorial Office of Chinese Rare Earths. All rights reserved.

引用

页码：261 / 267

页数：6

共 19 条

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