Design of micro sensor for wall shear stress measurement

被引：0
|
作者：
Lü H. [1 ]
Jiang C. [1 ]
Deng J. [1 ]
Ma B. [1 ]
Yuan W. [1 ]
机构：
[1] Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2010年 / 46卷 / 24期
关键词：
Design; Micro sensor; Simulation; Wall shear stress; Wind tunnel test;
D O I：
10.3901/JME.2010.24.054
中图分类号：
学科分类号：
摘要：
The measurement of wall shear stress is an important task in fluid dynamics. The micro shear stress sensor which is designed and fabricated by using MEMS technology can supply a new method for this measurement. During the process of design, the relationship between the linear displacement of floating element and the width of elastic beam is deduced. The caging devices are designed to improve the overload capability of the micro sensor. The maximum deviation of finite element simulation results from the experimentally determined modes is 8.2%, indicating that the simplification of the structure and the types of elements are reasonable. During the process of fabrication, plasma etching technology is used to form the sensor structure, and wet etching technology to accomplish the release of floating elements. The dimension of the micro sensor is 3.4 mm×2.5 mm×0.6 mm. A special package is used to realize flush-mounting between the sensor and the wall. The wind tunnel test result shows that in the wind speed of 0~30 m/s, the sensor sensitivity is 51.2 mV/Pa. The micro shear stress sensor can be used to measure the wall shear stress. © 2010 Journal of Mechanical Engineering.
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页码：54 / 60
页数：6
相关论文
共 14 条
  • [1] Duan H., Liu P., He Y., Et al., Numerical investigation of drag-reduction control by micro-suction-blowing on airfoil, Acta Aeronau Tica ET Astronau Tica Sinica, 30, 7, pp. 1219-1226, (2009)
  • [2] Guo F., Bi Y., Cao G., Numerical simulation of friction resistance reduction of a flat plate by micro bubbles, Journal of Naval University of Engineering, 20, 6, pp. 50-54, (2008)
  • [3] Liu K., Yuan W., Zhong J., Et al., Experiments of low speed fluid boundary-layer separation, Chinese Journal of Mechanical Engineering, 44, 1, pp. 139-143, (2008)
  • [4] Chandrasekaran V., Cain A., Nishida T., Et al., Dynamic calibration technique for thermal shear stress sensors with variable mean flow, Proceedings of the 38th Aerospace Sciences Meeting and Exhibit, pp. 1-9, (2000)
  • [5] Schmidt M.A., Howe R.T., Senturia S.D., Et al., Design and calibration of a microfabricatedfloating-element shear-s tress sensor, IEEE Transactions on Electron Devices, 35, 6, pp. 750-757, (1988)
  • [6] Pan T., Hyman D., Mehregany M., Et al., Microfabricated shear stress sensors, Part 1: Design and fabrication, AIAA Journal, 37, 1, pp. 66-72, (1999)
  • [7] Hyman D., Pan T., Reshotko E., Et al., Microfabricated shear stress sensors. Part 2: Testing and calibration, AIAA Journal, 37, 1, pp. 73-78, (1999)
  • [8] Padmanabhan A., Sheplak M., Breuer K.S., Et al., Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows, TRANSDUCERS'97 1997 International Conference on Solid-State Sensors and Actuators, pp. 137-140, (1997)
  • [9] Kourouma H.Y.S., Design and analysis of an opticaldetection scheme for micromachined floating-element shear stress sensors, (2002)
  • [10] Zhang Y., Performance of V-shaped electrothermal silicon microactuator and its application, (2006)
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