Surface roughness of Ni/Ti multilayers made by magnetron sputtering

被引：1

作者：

Pan L. ^{[1
]}

Zhu J. ^{[1
]}

Wang X. ^{[1
]}

Jiang L. ^{[1
]}

Li H. ^{[1
]}

Xu J. ^{[1
]}

Zhang Z. ^{[1
]}

Wang Z. ^{[1
]}

Chen L. ^{[1
]}

机构：

[1] Institute of Precision Optical Engineering, Tongji University

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2010年 / 22卷 / 06期

关键词：

Atomic force microscope; Neutron supermirror; Roughness; X-ray reflection;

D O I：

10.3788/HPLPB20102206.1239

中图分类号：

学科分类号：

摘要：

Nickel/titanium multilayers with different period of 10, 30, 50 and 75 were fabricated by DC magnetron sputtering. Grazing incidence X-ray measured reflectivity was used to characterize the interfacial roughness of the multilayers. To study the evolution law of surface roughness of Ni/Ti multilayers with different period numbers, atomic force microscope(AFM) was used to characterize the surfaces of the multilayers. The results show that surface roughness of Ni/Ti multilayers increases with the number of periods of the multilayers. As the number of periods increases from 10 to 75, the roughness increases from 0.8 nm to 1.69 nm. Fitting results show that surface roughness mainly varies with the number of periods as a cubic function.

引用

页码：1239 / 1242

页数：3

共 19 条

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