The influence of the magnetic field configuration on plasma parameters and microstructure of niobium nitride films

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Instituto de investigaciones en materiales, Universidad Nacional Autónoma de México, Circuito Exterior s/n, CU, México D.F. 04510, Mexico [1 ]
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Surf. Coat. Technol. | / 13卷 / 6117-6121期
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Chemical inertness - Melting point - Niobium nitride;
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