Shop floor control in wafer fabrication based on drum-buffer-rope theory

被引：0
|
作者：
Guo, Yong-Hui [1 ]
Qian, Xing-San [1 ]
机构：
[1] Ctr. of Microelectronics Devmt., Univ. of Shanghai for S and T, Shanghai 200093, China
来源：
Jisuanji Jicheng Zhizao Xitong/Computer Integrated Manufacturing Systems, CIMS | 2006年 / 12卷 / 01期
关键词：
Silicon wafers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：111 / 116
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