Development of micropin fabrication process using tool based micromachining

被引：0
|
作者：
Rahman, M. Azizur [1 ]
Rahman, M. [1 ]
Kumar, A. Senthil [1 ]
Lim, H.S. [1 ]
Asad, A.B.M.A. [1 ]
机构：
[1] Advanced Manufacturing Laboratory, Department of Mechanical Engineering, National University of Singapore, Singapore 119260, Singapore
来源：
International Journal of Advanced Manufacturing Technology | 2006年 / 27卷 / 9-10期
关键词：
9;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：939 / 944
相关论文
共 50 条
  • [1] Development of micropin fabrication process using tool based micromachining
    Rahman, MA
    Rahman, M
    Kumar, AS
    Lim, HS
    Asad, ABMA
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2006, 27 (9-10): : 939 - 944
  • [2] Development of micropin fabrication process using tool based micromachining
    M. Azizur Rahman
    M. Rahman
    A. Senthil Kumar
    H.S. Lim
    A.B.M.A. Asad
    The International Journal of Advanced Manufacturing Technology, 2006, 27 : 939 - 944
  • [3] Modeling and fabrication of microhole by electrochemical micromachining using retracted tip tool
    Liu, Weidong
    Ao, Sansan
    Li, Yang
    Liu, Zuming
    Luo, Zhen
    Wang, Zhiping
    Song, Renfeng
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 50 : 77 - 84
  • [4] Development of a micromachining process for the fabrication of a superconductor magnetic-field sensor
    Microsystems Engineering Team, Department of Mechanical Engineering, Louisiana State University, Baton Rouge, LA 70803, United States
    不详
    Microsyst Technol, 2 (67-72):
  • [5] Development of a micromachining process for the fabrication of a superconductor magnetic-field sensor
    Natarajan, A
    Wang, W
    Ma, E
    Bhattacharya, RN
    Blaugher, RD
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 1999, 6 (02): : 67 - 72
  • [6] Development of a micromachining process for the fabrication of a superconductor magnetic-field sensor
    A. Natarajan
    W. Wang
    E. Ma
    R. N. Bhattacharya
    R. D. Blaugher
    Microsystem Technologies, 1999, 6 : 67 - 72
  • [7] Electrochemical micromachining based on multifunction tool for micromachining
    Dept. of Mechanical Eng., Harbin Inst. of Technology, Harbin 150001, China
    不详
    Shanghai Jiaotong Daxue Xuebao, 2006, 6 (909-913):
  • [8] Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining
    Kim, JH
    Wang, L
    Zurn, SM
    Li, L
    Yoon, YS
    Polla, DL
    INTEGRATED FERROELECTRICS, 1997, 15 (1-4) : 325 - 332
  • [9] Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique
    Sugandi, Gandi
    Majlis, Burhanuddin Yeop
    NEMS/MEMS TECHNOLOGY AND DEVICES, 2011, 254 : 171 - 174
  • [10] Tool wear studies in fabrication of microchannels in ultrasonic micromachining
    Cheema, Manjot S.
    Dvivedi, Akshay
    Sharma, Apurbba K.
    ULTRASONICS, 2015, 57 : 57 - 64
12345