Superconducting detector array for terahertz imaging applications

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作者：
Ariyoshi, Seiichiro [1 ]
Otani, Chiko [1 ]
Dobroiu, Adrian [2 ]
Matsuo, Hiroshi [3 ]
Sato, Hiromi [4 ]
Taino, Tohru [5 ]
Kawase, Kodo [2 ]
Shimizu, Hirohiko M. [6 ]
机构：
[1] Terahertz Sensing and Imaging Laboratory, Riken, Senden 980-0845, Japan
[2] Kawase Initiative Research Unit, Riken, Wako, Saitama 351-0198, Japan
[3] Advanced Technology Center, National Astronomical Observatory of Japan, Mitaka, Tokyo 181-8588, Japan
[4] Radiation Laboratory, Riken, Wako, Saitama 351-0198, Japan
[5] Department of Electrical and Electronic Systems, Saitama University, Saitama 338-8570, Japan
[6] Institute of Materials and Structure Science, KEK, Tsukuba, Ibaraki 305-0801, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2006年 / 45卷 / 37-41期
关键词：
We designed; fabricated; and characterized a superconducting detector array for terahertz imaging applications. To evaluate the optical performance as an imaging array; we measured the spectral response of a 5-pixel linear array detector; and confirmed its sensitivity peaks to be at the same frequency within accuracy of one percent in the range of 0.65 THz. The frequency peaks are also in good agreement with a numerical calculation. This linear array was tested in the nondestructive imaging of a metallic pattern and an integrated-circuit card; and allowed the shortening of the total acquisition time. High fabrication yield of about 99% was achieved for single superconducting tunnel junctions; which led to 90% yield for the detectors. ©2006 The Japan Society of Applied Physics;
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