Effects of residual stress on the performances of electrostatically actuated mems micromirrors

被引：0
|
作者：
Hu, Fangrong [1 ,2 ]
Yao, Jun [1 ]
Chen, Jianming [3 ]
机构：
[1] State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Acad. of Sci., Chengdu, Sichuan 610209, China
[2] Graduate University of the Chinese Acad. of Sci., Beijing 100039, China
[3] Science College, Kunming University of Science and Technology, Kunming, Yunnan 650093, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2009年 / 36卷 / SUPPL. 2期
关键词：
D O I：
10.3788/CJL200936s2.0030
中图分类号：
学科分类号：
摘要：
11
引用
收藏
页码：30 / 34
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