Reactive ion etching of transition-metal alloys

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作者：
Nanotechnology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan [1 ]
不详 [2 ]
不详 [3 ]
不详 [4 ]
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来源：
Shinku | 2006年 / 12卷 / 716-721期
关键词：
Transition metal alloys;
D O I：
10.3131/jvsj.49.716
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