Intelligent fuzzy control of a scanning probe microscope system design

This research is to use intelligent fuzzy control for a Scanning ProbeMicroscope (SPM) system design to reduce the hysteresis effect of the forceactuator. In which a balance with stylus probe, force actuator, LVDT (LinearVariable Differential Transformer), Linear Velocity Transducer (LVT), load cell,personal computer, and XYZ-stages are integrated into a contact-force-controlled SPM system, such that the surface of sample will not be destroyed bythe contact force of stylus probe. An intelligent Proportion and Derivative (PD)type fuzzy controller, instead of the P1 compensator in the previous one, isapplied in the design. Noted that the triangular distribution functions areapplied instead of Gaussian ones, because the computation times for the formercan be reduced.This improvement is better and has been verified by MATLABsimulation and practical implementation of a surface profiler. Finally, theprofile of the object surface is displayed on a 3D graph. ICIC International© 2009.