Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

被引：0
|
作者：
Wen, Zhiwei [1 ]
Xu, Qinwen [1 ]
Liu, Jieyu [1 ]
Qu, Yuanhang [1 ]
Liu, Yan [1 ]
Liu, Wenjuan [1 ,2 ]
Soon, Bo Woon [2 ,3 ]
Cai, Yao [1 ,2 ]
Sun, Chengliang [1 ,2 ]
机构：
[1] The Institute of Technological Sciences, Wuhan University, Hubei, Wuhan,430072, China
[2] Hubei Yangtze Memory Laboratories, Wuhan,430205, China
[3] School of Microelectronics, Wuhan University, Wuhan,430072, China
来源：
Japanese Journal of Applied Physics | 2022年 / 61卷 / 11期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
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中图分类号：
学科分类号：
摘要：
Acoustic surface wave filters - Acoustic waves - Butterworth filters - Piezoelectricity - Vibration analysis
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