Nanosecond laser pulses-induced surface microstructures on silicon

被引：0
|
作者：
Yuan C. [1 ]
Li X. [1 ]
Tang D. [1 ]
Yang H. [1 ]
机构：
[1] School of Science, Southwest University of Science and Technology
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2010年 / 22卷 / 02期
关键词：
Laser ablation; Light reflection; Nanosecond laser pulses; Silicon; Surface microstructure;
D O I：
10.3788/HPLPB20102202.0393
中图分类号：
学科分类号：
摘要：
The surface spike microstructures are formed by Nd: YAG nanosecond laser pulses irradiating single crystal silicon wafers with energy densities within the ablation regime, in SF6 or air atmosphere. All the tops of the spikes created in SF6 atmosphere have small spheres, there are still the secondary tips on some spikes. There is granular material on the top and the edge of the spikes induced by nanosecond laser pulses in air atmosphere, which is formed by solidification of the droplets. The microstructures formed in air are different from the slender whiskerlike structures created by excimer laser and also different from the conical microstructures with dendritic nanostructures formed under femtosecond laser irradiation. The experimental results suggest that both the laser wavelength and the pulse duration are involved in the formation of the spike microstructures. The preliminary experiment in air shows that the radiation reflectivity is not more than 20% at the wavelength range of 500~2400 nm.
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页码：393 / 395
页数：2
相关论文
共 17 条
  • [1] Sanchez F., Morenza J.L., Aguiar R., Et al., Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation, Appl Phys Lett, 69, 5, pp. 620-623, (1996)
  • [2] Her T.H., Finlay R.J., Wu C., Et al., Microstructuring of silicon with femtosecond laser pulses, Appl Phys Lett, 73, 12, pp. 1673-1675, (1998)
  • [3] Pedraza A.J., Fowlkes J.D., Lowndes D.H., Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation, Appl Phys Lett, 74, 16, pp. 2322-2324, (1999)
  • [4] Pedraza A.J., Fowlkes J.D., Lowndes D.H., Self-organized silicon microcolumn arrays generated by pulsed laser irradiation, Appl Phys A, 69, pp. 731-734, (1999)
  • [5] Zhao M., Yin G., Zhu J., Et al., Picosecond pulse laser microstructuring of silicon, Chin Phys Lett, 20, 10, pp. 1789-1791, (2003)
  • [6] Younkin R., Carey J.E., Mazur E., Et al., Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses, Journal of Applied Physics, 93, 5, pp. 2626-2629, (2003)
  • [7] Crouch C.H., Carey J.E., Shen M., Et al., Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation, Appl Phys A, 79, pp. 1635-1641, (2004)
  • [8] Zorba V., Alexandrou I., Zergioti I., Et al., Laser microstructuring of Si surfaces for low-threshold field-electron emission, Thin Solid Films, 453-454, pp. 492-495, (2004)
  • [9] Crouch C.H., Carey J.E., Warrender J.M., Et al., Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon, Appl Phys Lett, 84, 11, pp. 1850-1852, (2004)
  • [10] Huang Z.H., Carey J.E., Liu M.G., Et al., Microstructured silicon photodetector, Appl Phys Lett, 89, (2006)
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